VHS, HS, AX DIFFUSION PUMP

Agilent has earned its position as the leading diffusion pump manufacturer in the world by listening to customer needs and by continuously improving the performance and reliability of their benchmark designs. Throughout their more than forty years of leadership in the industry, they have consistently produced pumps that provide the most efficient means of converting heat into pumping throughput.

Agilent’s experience has allowed them to optimize the design of every element of the pump. As a result, Agilent diffusion pumps offer you the lowest cost of ownership available for many high vacuum-pumping applications.

FEATURES AND BENEFITS

Low Cost of Ownership

By providing the highest throughput available per unit of power, reduced cooling water requirements, and rugged, durable construction, Agilent delivers large volume pumping at the lowest total cost to you.

Built for Production Volumes

Agilent’s success is in helping you meet the exacting requirements of your production process. Their pumps deliver superior pumping at high pressure and high gas flow conditions, and handle gas load variations that are typical of large volume production

Robust Boiler Design

Through optimized boiler design, Agilent pumps are stable and reliable under widely varying operating conditions.  This temperature stability prolongs fluid life as well. Thermal protection switches prevent system over-temperature conditions.

Options to Address Your Needs

Many applications have unique requirements. Agilent can provide additional features such as Halo or custom baffles to eliminate additional backstreaming, and a Quick Cool Coil option to accelerate system cycle times.

Fully Optimized Jet

Using their long and varied experience, Agilent designs and produces vapor jets that deliver the highest throughput pressure stability, and tolerable foreline pressure available, while reducing backstreaming to a minimum.

Easy to Maintain

Maintaining uptime is critical so we have simplified operation and maintenance. A sight glass provides visual indication of status when cold or hot and under vacuum. A gauge port facilitates system troubleshooting.

vhs-10_new9212011_1


PERFORMANCE:

    AX-65 HS-2 VHS-4 VHS-6 VHS-250 VHS-10 VHS-400 HS-16 HS-20 HS-32 NHS-35
Pumping speed (operating range) l/s
Air 65 160 750 1550 2125 3650 4,500 6,000 10,000 17,300 28,000
Helium & hydrogen 90 200 940 1930 2660 4560 5,625 7,500 12,500 21,625 35,000
Pumping speed AVS 4.1 (1963) – 285 1200 2400 3700 5300 8,000 10,000 17,500 32,000 50,000
Maximum forepressure mbar
No load 1.00 0.72 0.86 0.85 0.85 0.85 0.85 0.85 0.85 0.65 0.71
  Full load 0.78 0.52 0.73 0.72 0.72 0.72 0.72 0.72 0.72 0.45 0.52
Maximum throughput mbar-l/s
In operating range 0.25 0.80 2.0 3.2 3.5 8.4 8.4 11.7 16.7 40 33
@1.3×10-2 mbar 0.40 0.93 3.2 4.5 4.5 10.0 10.0 15.3 23.4 45.5 45.5
Minimum recommended backing pump for maximum throughput m3/hr 0.25 8.5 17 28.9 28.9 51 51 136 170 510 510
Backstreaming rate at inlet flange mg/cm2/min (standard cold cap) mg/cm2/min 2×10-4 1×10-3 5×10-4 5×10-4 5×10-4 5×10-4 1×10-3 1×10-3 1×10-3 7×10-4 5×10-4
Warmup time Min 7 15 10 10 10 15 15 30 45 60 60
Cooldown time, with quick cool coil, where applicable Min 10 10 10 10 10 25 25 30 45 60 60
Fluid charge cc 30 100 300 500 500 1000 1000 2.8 liters 4.7 liters 11.3 liters 11.3 liters
electrical requirements   1 ph,
50/60Hz
90/115/165/220 V		 1 ph,
50/60Hz
120/240
V		 1 ph,
50/60Hz
120/208/240 V		 1 ph,
50/60Hz
120/208/240 V		 1 ph,
50/60Hz
120/208/240 V		 3 ph
50/60 Hz
208/240/380/480 V		 3 ph
50/60 Hz
208/240/380/480 V		 3 ph
50/60 Hz
240/415/480 V		 3 ph
50/60 Hz
240/415/480 V		 3 ph
50/60 Hz
240/415/480 V		 3 ph
50/60 Hz
240/415/480 V
Power Watt 200/250 450 1450 2200 2200 4400 4400 8100/9600 12000 24000 24000
Cooling water at 15-26 °C l/hr N/A 20 30 50 50 80 80 300 300 800 800


AX Diffusion Pump

ax-65_web ax-65-a

HS, NHS Diffusion Pump

hs2_2 hs-20_diffusion_pump_lg

VHS Diffusion Pump

vhs-6_1 vhs-10_new9212011_1s vhs-400_3a