AGILENT ION PUMP

Since the late 1950’s, when the ion pump was invented at Varian, now Agilent Technologies, any changes and technical improvements have taken place. Virtually all of the major innovations have come from us, from the first diode VacIon pump to the Triode, then to the StarCell series pumps, and the VacIon Plus.

VacIon Plus Ion Pump

VacIon Plus is a complete family of ion pumps, controllers, options, and accessories, designed to provide solutions to every application. Parameters such as operating pressure, the gas mixture to be pumped, the starting pressure, etc. can vary so dramatically that Varian, today Agilent, decided to develop dedicated ion pump solutions (including controllers and all other accessories) for different applications.

The VacIon Plus family includes diode, Noble diode, and StarCell pump versions that allow Agilent to provide the best technology for each field of application. The family is complemented by the new 4UHV Ion Pump controllers, that provide different power levels and interface capabilities.

Titanium sublimation Combination Pumps (TSP)

 The titanium sublimation creates extra high getterable gas pumping speed while the ion pumping mechanisms handle the non-getterable gases such as argon and methane. The combination pump includes the cylindrical cryopanel and TSP source mounted to the extra port.  Customized pump configurations are also available.

4UHV – For Ultra High Vacuum

The new state-of-the-art Agilent 4uHV Ion Pump Controller operates up to four pumps simultaneously and independently. The 4uHV starts and controls ion pumps of any type (diode, Noble diode, StarCell) and size (from 10 to 2500 l/s). A large four-line lCd display allows simultaneous reading of individual pump voltage, current and pressure. The variable voltage feature ensures optimum pumping speed and pressure reading throughout the operating pressure range. Built-in set points, remote operation and rS232/485 computer interface are standard. Ethernet and Profibus are options.

FEATURES AND BENIFITS:

  • The VacIon Plus pump family is complemented by the new 4UHV Ion Pump controller, that provides different power levels and interface capabilities.
  • The compact MiniVac controller and a dedicated TSP controller are also available.
  • The new series of IPCU controller units completes Agilent’s offer.
  • The existing range of ion pump controllers offers more choice and flexibility than ever before. With the latest in design features, they are simple and easy to operate; just select the right controller to fit your specific application.
  • Agilent is the only manufacturer to offer specially designed SEM ion pumps. These pumps are ideal for the high vacuum guns where stable vacuum and low leakage current is required to control and preserve the charged particle filament.
  • The key to this superior performance is Agilent’s patented anode design which uses contoured cells and simplified electrical elements. This insures stable current readings and lower particle generation.
  • When combining the SEM ion pump on the gun with a StarCell ion pump on the lower column, Agilent ion pumps can offer a powerful combination optimised for modern E-beam columns.

vacion-300-sc-combi_9192640_01-2


PERFORMANCE:

Miniature Pump   2 l/s Pump 10 l/s Pump Vaclon Plus 20 Vaclon Plus 40 Vaclon Plus 55
Inlet flange 2 ¾” OD CFF 2 ¾” OD CFF 4 ½” OD CFF
Element type Diode Diode Diode StarCell Noble Diode Diode StarCell Noble Diode Diode StarCell Noble Diode Diode
Pumping Speed(Saturated Pump at 1-6 mbar) Nitrogen l/s 0.2 2 10 20 22 27 34 36 40 50 53 55
Operating Life  (at 1-6 mbar) Hours N/A 8000 40000 80 50 50 80 50 50 80 50 50
Max. Starting Pressure mbar 1 x 10-4 1 x 10-4 ≤1 x 10-4 <10-2 <10-3 <10-3 <10-2 <10-3 <10-3 <10-2 <10-3 <10-3
Max. Baking Temperature °C 400 (without magnet)
150 (with magnet)		 400 (without magnet)
150 (with magnet)		 350 350 350 350 350 350 350 350 350 350
Weight Kg 0.3 0.3 4 7 17 18
SEM version available on request – – + + + +


PERFORMANCE:

Inlet flange Vaclon Plus 75 Vaclon Plus 150 Vaclon Plus 300 Vaclon Plus 500
Element type 6” OD CFF 6” OD CFF 8” OD CFF 8” OD CFF
Pumping Speed(Saturated Pump at 1-6 mbar) Nitrogen StarCell Noble Diode Diode StarCell Noble Diode Diode StarCell Noble Diode Diode StarCell Noble Diode Diode
Operating Life  (at 1-6 mbar) l/s 65 68 75 125 135 150 240 260 300 410 440 500
Max. Starting Pressure Hours 80 50 50 80 50 50 80 50 50 80 50 50
Max. Baking Temperature mbar <10-2 <10-3 <10-3 <10-2 <10-3 <10-3 <10-2 <10-3 <10-3 <10-2 <10-3 <10-3
Weight °C 350 350 350 350 350 350 350 350 350 350 350 350
SEM version available on request Kg 19 43 69 120
Inlet flange + – – –


Miniature Ion Pump

mini-vacion-pump_02 mini-vacion-pump_03

Vaclon Plus Ion Pump

vacion-55_9191340_01 vacion-150_02vacion-300-sc-combi_9192640_01-2

4UHV Controller

4uhv-ion-pump-controller_02minivac-controller_9290190_014uhv-ion-pump-controller_01